A Sensitivity-Enhanced Vertical-Resonant MEMS Electric Field Sensor Based on TGV Technology.

In order to enhance the sensitivity of wafer-level vacuum-packaged electric field sensors, this paper proposed a vertical-resonant MEMS electric field sensor based on TGV (Through Glass Via) technology. The microsensor is composed of the electric field sensing cover, the drive cover, and the SOI-based microstructures between them. TGV technology is innovatively used to fabricate the electric field sensing cover and the vertically-driven cover. The external electric field is concentrated and transmitted to the area below the silicon plate in the center of the electric field sensing cover through a metal plate and a metal pillar, reducing the coupling capacitance between the silicon plate and the packaging structure, thereby achieving the enhanced transmission of the electric field. The sensitivity-enhanced mechanism of the sensor is analyzed, and the key parameters of the sensor are optimized through finite element simulation. The fabrication process is designed and realized. A prototype is tested to characterize its performance. The experimental results indicate that the sensitivity of the sensor is 0.82 mV/(kV/m) within the electrostatic electric field ranging from 0-50 kV/m. The linearity of the sensor is 0.65%.

A Highly Sensitive and High-Resolution Resonant MEMS Electrostatic Field Microsensor Based on Electrostatic Stiffness Perturbation.

This paper proposes a highly sensitive and high-resolution resonant MEMS electrostatic field sensor based on electrostatic stiffness perturbation, which uses resonant frequency as an output signal to eliminate the feedthrough interference from the driving voltage. The sensor is composed of a resonator, driving electrode, detection electrode, transition electrode, and electrostatic field sensing plate. The working principle is that when there is an electrostatic field, an induction charge will appear at the surface of the electrostatic field sensing plate and induce electrostatic stiffness on the resonator, which will cause a resonant frequency shift. The resonant frequency is used as the output signal of the microsensor. The characteristics of the electrostatic field sensor are analyzed with a theoretical model and verified by finite element simulation. A device prototype is fabricated based on the Silicon on Insulator (SOI) process and tested under vacuum conditions. The results indicate that the sensitivity of the sensor is 0.1384Hz/(kV/m) and the resolution is better than 10 V/m.

4-Mercaptopyridine-Modified Sensor for the Sensitive Electrochemical Detection of Mercury Ions.

As a highly toxic heavy metal ion, mercury ion (Hg2+) pollution has caused serious harm to the environment and human health. In this paper, 4-mercaptopyridine (4-MPY) was selected as the sensing material and decorated on the surface of a gold electrode. Trace Hg2+ could be detected by both differential pulse voltammetry (DPV) and electrochemical impedance spectroscopy (EIS) methods. The proposed sensor displayed a wide detection range from 0.01 µg/L to 500 µg/L with a low limit of detection (LOD) of 0.002 µg/L by EIS measurements. Combined with molecular simulations and electrochemical analyses, the chelating mechanism between Hg2+ and 4-MPY was explored. Through the analysis of binding energy (BE) values and stability constants, 4-MPY showed an excellent selectivity for Hg2+. In the presence of Hg2+, the coordination of Hg2+ with the pyridine nitrogen of 4-MPY was generated at the sensing region, which caused a change in the electrochemical activity of the electrode surface. Due to the strong specific binding capability, the proposed sensor featured excellent selectivity and an anti-interference capability. Furthermore, the practicality of the sensor for Hg2+ detection was validated with the samples of tap water and pond water, which demonstrated its potential application for on-site environmental detection.

A Highly Sensitive Dual-Signal Strategy via Inner Filter Effect between Tween 20-Gold Nanoparticles and CdSe/ZnS Quantum Dots for Detecting Cu2.

A highly sensitive and accurate dual-signal strategy is developed for trace Cu2+ detection based on the inner filter effect (IFE) between Tween 20-gold nanoparticles (AuNPs) and CdSe/ZnS quantum dots (QDs). Tween 20-AuNPs are utilized as colorimetric probes and excellent fluorescent absorbers. The fluorescence of CdSe/ZnS QDs can be quenched efficiently by Tween 20-AuNPs via IFE. In the presence of D-penicillamine, D-penicillamine induces the aggregation of Tween 20-AuNPs and the fluorescent recovery of CdSe/ZnS QDs at high ionic strength. Upon addition of Cu2+, D-penicillamine tends to selectively chelate with Cu2+ and then forms the mixed-valence complexes, which consequently inhibits the aggregation of Tween 20-AuNPs and the fluorescent recovery. The dual-signal method is used to quantitatively detect trace Cu2+, with low detection limits of 0.57 µg/L and 0.36 µg/L for colorimetry and fluorescence, respectively. In addition, the proposed method using a portable spectrometer is applied to the detection of Cu2+ in water. This sensitive, accurate and miniature sensing system has potential in environmental evaluations.

Quantifiable Effect of Interparticle Plasmonic Coupling on Sensitivity and Tuning Range for Wavelength-Mode LSPR Fiber Sensor Fabricated by Simple Immobilization Method.

Herein a gold nanosphere (AuNS)-coated wavelength-mode localized surface plasmon resonance (LSPR) fiber sensor was fabricated by a simple and time-saving electrostatic self-assembly method using poly(allylamine hydrochloride). Based on the localized enhanced coupling effect between AuNSs, the LSPR spectrums of the AuNS monolayer with good dispersity and high density exhibited a favourable capability for refractive index (RI) measurement. Based on the results obtained from the optimization for AuNS distribution, sensing length, and RI range, the best RI sensitivity of the fiber modified by 100 nm AuNS reached up to about 2975 nm/RIU, with the surrounding RI range from 1.3322 to 1.3664. Using an 80 nm AuNS-modified fiber sensor, the RI sensitivity of 3953 nm/RIU was achieved, with the RI range increased from 1.3744 to 1.3911. The effect of sensing length to RI sensitivity was proven to be negligible. Furthermore, the linear relationship between the RI sensitivity and plasma resonance frequency of the bulk metal, which was dependent on the interparticle plasmon coupling effect, was quantified. Additionally, the resonance peak was tuned from 539.18 nm to 820.48 nm by different sizes of AuNSs-coated fiber sensors at a RI of 1.3322, which means the spectrum was extended from VIS to NIR. It has enormous potential in hypersensitive biochemistry detection at VIS and NIR ranges.

Wafer-Level Vacuum-Packaged Electric Field Microsensor: Structure Design, Theoretical Model, Microfabrication, and Characterization.

This paper proposes a novel wafer-level vacuum packaged electric field microsensor (EFM) featuring a high quality factor, low driving voltage, low noise, and low power consumption. The silicon-on-insulator (SOI) conductive handle layer was innovatively used as the sensing channel to transmit the external electric field to the surface of the sensitive structure, and the vacuum packaging was realized through anodic bonding between the SOI and glass-on-silicon (GOS). The fabrication process was designed and successfully realized, featured with a simplified process and highly efficient batch manufacturing, and the final chip size was only 5 × 5 mm. A theoretical model for the packaged device was set up. The influence of key parameters in the packaging structure on the output characteristics of the microsensor was analyzed on the basis of the proposed model. Experiments were conducted on the wafer-level vacuum-packaged EFM to characterize its performance. Experimental results show that, under the condition of applying 5 V DC driving voltage, the required AC driving voltage of the sensor was only 0.05 VP, and the feedthrough was only 4.2 mV. The quality factor was higher than 5000 and was maintained with no drop in the 50-day test. The vacuum in the chamber of the sensor was about 10 Pa. A sensitivity of 0.16 mV/(kV/m) was achieved within the electrostatic field range of 0-50 kV/m. The linearity of the microsensor was 1.62%, and the uncertainty was 4.42%.

[OPy][BF4] Selective Extraction for Trace Hg2+ Detection by Electrochemistry: Enrichment, Release and Sensing.

Trace mercury ion (Hg2+) detection is important for environmental monitoring and water safety. In this work, we study the electrochemical strategy to detect trace Hg2+ based on the preconcentration of temperature-controlled N-octylpyridinium tetrafluoroborate ([OPy][BF4]) dispersive liquid-liquid microextraction. The [OPy][BF4] selectively extracted Hg2+ from aqueous solution by the adsorption of unsaturated N in [OPy][BF4], which increased the concentration of Hg2+ and decreased that of other interference ions. It was noted that the adsorption of [OPy][BF4] to Hg2+ was weakened by aqueous solution. Hence, after extraction, precipitated [OPy][BF4] was diluted by a buffer solution comprising a mixture of water and acetonitrile to release Hg2+ and the single was detected by electrochemistry. Water is proposed to release Hg2+ adsorbed by [OPy][BF4], and the acetonitrile serves as a co-solvent in buffer solution. Sensitivity and anti-inference ability of sensors were improved using the proposed method and Hg2+ releasing procedure. The detection limit (S/N = 3) of the sensor is 0.0315 µg/L with a linear range from 0.1 to 1 µg/L. And the sensor exhibits good recovery with an range from 106 % to 118%, which has great potential for trace Hg2+ determination.

An Electric Field Microsensor with Mutual Shielding Electrodes.

This paper proposes an electric field microsensor (EFM) with mutual shielding electrodes. Based on the charge-induction principle, the EFM consists of fixed electrodes and piezoelectric-driving vertically-movable electrodes. All the fixed electrodes and movable electrodes work as both sensing electrodes and shielding electrodes. In other words, all the fixed and movable electrodes are sensing electrodes, and they are mutually shielding electrodes simultaneously. The movable electrodes are driven to periodically modulate the electric field distribution at themselves and the fixed electrodes, and the induced currents from both movable and fixed electrodes are generated simultaneously. The electrode structure adopts an interdigital structure, and the EFM has been simulated by finite element methods. Simulation results show that, since the sensing area of this EFM is doubled, the variation of induced charge is twice, and therefore the output signal of the sensor is increased. The piezoelectric material, lead zirconate titanate (PZT), is prepared by the sol-gel method, and the microsensor chip is fabricated.

Cathodically Pretreated AuNPs-BDD Electrode for Detection of Hexavalent Chromium.

Hexavalent chromium (Cr (VI)) has strong oxidizing properties and can result in strong carcinogenic effects on human bodies. Therefore, it is necessary to detect hexavalent chromium sensitively and accurately. This article proposes the gold nanoparticles (AuNPs)-boron-doped diamond (BDD) electrode for the direct determination of chromium with a green and simple detection process by cathodic stripping voltammetry. Gold nanoparticles are used to enhance the detection performance toward Cr (VI). The effect of different pretreatment methods on electrode modification has been studied, and the detection parameters have been optimized. With the optimized conditions, the AuNPs-BDD electrode presents a good linear behavior in a Cr (VI) concentration range of 10 to 1000 µg/L. A low limit of detection of 1.19 µg/L is achieved. The detection process is simple and environmentally friendly. The sensor has been tested for the detection of Cr (VI) in a real water sample with satisfactory results, which indicates potential application of the AuNPs-BDD electrode for the sensitive and onsite detection of Cr (VI).

Synthesis and Characterization of Ru-MOFs on Microelectrode for Trace Mercury Detection.

Mercury ions (Hg2+) pollution in the water environment can cause serious harm to human health. Trace Hg2+ detection is of vital importance for environmental monitoring. Herein, we report a novel design of Ru-MOFs modified gold microelectrode for Hg2+ determination. Ru-MOFs are synthesized directly by the cathodic method on gold microelectrode, with the covered area accurately controlled. Cathodic synthesized Ru-MOFs show good conductivity and are suitable to be used as the electrode surface material directly. The synergy of the pre-deposition process and the adsorption process of Ru-MOFs can effectively improves the performance of the sensor. The results show good linearity (R2 = 0.996) from 0.1 ppb to 5 ppb, with a high sensitivity of 0.583 µA ppb-1 mm-2. The limit of detection is found to be 0.08 ppb and the test process is within 6 min. Most importantly, the senor has a good anti-interference ability and the recoveries are satisfactory. This miniature electrochemical sensor has the potential for on-site detection of trace mercury in the field.

A MEMS-Based Multi-Parameter Integrated Chip and Its Portable System for Water Quality Detection.

As an important means to protect water resources, water quality detection is of great social and economic significance. Water quality detection sensors processed by micro-electro-mechanical system (MEMS) technology have the advantages of low-cost, small size, and high sensitivity. In this paper, a multi-parameter water quality detection integrated sensor chip is further studied, and a portable detection system using this chip is developed. Temperature, pH, oxidation-reduction potential (ORP), conductivity and concentration of copper ions (Cu2+) are selected as typical water quality parameters. Experiments of sensor calibrations using this portable detection system were performed in standard solutions. The sensor has a sensitivity of -57.34 mV/pH in pH detection and 5.95 Ω/°C in temperature response. ORP is directly detected by Pt microelectrode on the chip and the relative error is less than 3%. The electrode constant of the sensor is 1.416 cm-1 and the linearity is 0.9995 in conductivity detection. With the gold nanoparticles deposited on the electrode, the detection peak of Cu2+ appears at 280 mV and the sensor shows good linearity to the concentration of Cu2+ in the range of 0-0.6 mg/L. The detection limit of Cu2+ concentration is 2.33 µg/L. Through measurement and calculation, the accuracy of the portable system is within 4%. This portable multi-parameter water quality detection system with the MEMS-based integrated chip shows great potential in the field and fast detection.

Poly(sulfosalicylic acid)-functionalized gold nanoparticles for the detection of tetrabromobisphenol A at pM concentrations.

Developing a sensitive, simple and fast sensing system for 3,3',5,5'-tetrabromobisphenol A (TBBPA) is important because of its ubiquitousness and high toxicity. In this work, a gold nanoparticles (AuNPs) and poly(sulfosalicylic acid) (PSSA) composite film (AuNPs-PSSA) is fabricated in-situ on an electrode surface via cyclic voltammetry scanning. The characterization via scanning electron microscopy (SEM), atomic force microscopy (AFM), energy dispersive X-ray (EDX) analysis and Fourier transform infrared (FTIR) spectroscopy indicate that the PSSA film is homogeneously decorated with AuNPs, and a highly uniform and thin composite film is obtained. Electrochemical tests reveal that the AuNPs-PSSA film exhibits larger active surface area, lower charge transfer resistance and higher accumulation efficiency toward TBBPA than single AuNPs and PSSA film. As a result, the oxidation signals and sensing sensitivity of TBBPA are significantly enhanced on the surface of the AuNPs-PSSA. The developed TBBPA sensing platform using AuNPs-PSSA composite film, with low detection limit (25 pM) and wide linear range (0.1-10 nM), is successfully utilized to measure TBBPA level in wastewater samples. The results are highly consistent with those that obtained from high-performance liquid chromatography. The preparation and reusability of the TBBPA sensor can be automatically achieved through CV scanning, providing a promising on-line monitoring system for wastewater samples.

Determination of Mercury(II) on A Centrifugal Microfluidic Device Using Ionic Liquid Dispersive Liquid-Liquid Microextraction.

An integrated centrifugal microfluidic device was developed to preconcentrate and detect hazardous mercury (II) in water with ionic liquid as environmentally friendly extractant. An automatically salt-controlled ionic liquid dispersive liquid-liquid microextraction on a centrifugal microfluidic device was designed, fabricated, and characterized. The entire liquid transport mixing and separation process was controlled by rotation speed, siphon valves, and capillary valves. Still frame images on the rotating device showed the process in detail, revealing the sequential steps of mixing, siphon priming, transportation between chambers, and phase separation. The preconcentration of red dye could be clearly observed with the naked eye. By combining fluorescence probe and microscopy techniques, the device was tested to determine ppb-level mercury (II) in water, and was found to exhibit good linearity and low detection limit.

Palladium-Gold Modified Ultramicro Interdigital Array Electrode Chip for Nitrate Detection in Neutral Water.

An ultramicro interdigital array electrode modified by palladium-gold was developed for nitrate detection in neutral water. The ultramicro interdigital array electrode was fabricated based on silicon substrate by Micro Electro-Mechanical System (MEMS) technique. The nanostructured palladium-gold (Pd-AuNPs) composite sensing film was electrodeposited on the surface of a working electrode by electrochemical method. The synergistic effect of Pd-AuNPs composite was investigated and its enhancement of the catalytic activity and stability was revealed. The Pd-AuNPs modified electrode showed good linearity (R² = 0.99) from 1 mg/L to 15 mg/L (as N) for nitrate determination in a neutral water environment (pH = 7.2), with a sensitivity of 4.7 µA·mg-1·L. The results showed that the developed Pd-AuNPs-modified ultramicro interdigital array electrode chip can achieve sensitive and environmentally-friendly detection for nitrate in neutral water.

Paper-Based Sensor Chip for Heavy Metal Ion Detection by SWSV.

Heavy metal ion pollution problems have had a terrible influence on human health and the environment. Therefore, the monitoring of heavy metal ions is of great practical significance. In this paper, an electrochemical three-electrode system was fabricated and integrated on nitrocellulose membrane (NC) by the use of magnetron sputtering technology, which exhibited a uniform arrangement of porous structure without further film modification. This paper-based sensor chip was used for Cu2+ detection by square-wave stripping voltammetry (SWSV). Within the ranges of 5~200 µg·L-1 and 200~1000 µg·L-1, it showed good linearity of 99.58% and 98.87%, respectively. The limit of detection was 2 µg·L-1. On the basis of satisfying the detection requirements (10 µg·L-1), the integrated sensor was small in size and inexpensive in cost. Zn2+, Cd2+, Pb2+ and Bi3+ were also detected by this paper-based sensor chip with good linearity.

A wavelength-modulated localized surface plasmon resonance (LSPR) optical fiber sensor for sensitive detection of mercury(II) ion by gold nanoparticles-DNA conjugates.

The study presented herein investigated an easy preparation, high performance, wavelength-modulated LSPR optical fiber chemosensor coated by gold nanospheres(AuNS) for Hg2+ detection based on thymine-Hg2+-thymine base pair mismatches and the coupled plasmonic resonance effect.Utilizing electrostatic self-assembly method, the high density and dispersivity monolayer AuNS coated LSPR fiber sensor had the near field refractive index sensitivity up to 2016 nm/RIU. The single-strand probe DNA served as a binding element for free AuNS labelled-target DNA conjugates was attached to the monolayer AuNS by Au-S bond. In the present of Hg2+, the coupled plasmonic resonance band between monolayer AuNS and free AuNS was produced by thymine-Hg2+-thymine structure and leaded to red-shift of LSPR peak. Under the optimal conditions, the enlarged red-shift in peak of LSPR spectroscopy was linearly with the concentration of Hg2+ in the range from 1.0 × 10-9 to 5.0 × 10-8 M with the coefficient of 0.976. The limit of detection was 0.7 nM(S/N = 3). The specificity of the sensor was proved high by evaluating the response to other heavy metal ions. The proposed fiber sensor provided a label-free, miniature, low-cost approach for the Hg2+ detection and had potential in real environmental evaluations.

Synthesis and electrochemical sensing application of poly(3,4-ethylenedioxythiophene)-based materials: A review.

As a significant and promising conducting polymer, poly(3,4-ethylenedioxythiophene) (PEDOT) has attracted considerable attention in the last decade. This review aims at giving a comprehensive illustration about current progress on the synthesis and electrochemical sensing applications of PEDOT-based materials in environmental monitoring, food and drug analysis and health care. PEDOT-based materials, such as PEDOT, functionalized PEDOT and PEDOT composites were fabricated mainly by chemical polymerization and electrochemical polymerization. Various nanostructures with large surface area, high conductivity, fast electron transfer rate, hydrophobic interaction and good biocompatibility were displayed by the PEDOT-based materials. Synergetic effects were enhanced dramatically in electrochemical (bio) sensors by PEDOT composites, especially by those incorporated with versatile nanomaterials. Through this paper, we hope to attract attention from a wider community and inspire researchers to take advantage of PEDOT in approaching scientific challenges and developments.

Design, Fabrication and Characterization of a MEMS-Based Three-Dimensional Electric Field Sensor with Low Cross-Axis Coupling Interference.

One of the major concerns in the development of three-dimensional (3D) electric field sensors (EFSs) is their susceptibility to cross-axis coupling interference. The output signal for each sensing axis of a 3D EFS is often coupled by electric field components from the two other orthogonal sensing axes. In this paper, a one-dimensional (1D) electric field sensor chip (EFSC) with low cross-axis coupling interference is presented. It is designed to be symmetrical, forming a pair of in-plane symmetrically-located sensing structures. Using a difference circuit, the 1D EFSC is capable of sensing parallel electric fields along symmetrical structures and eliminating cross-axis coupling interference, which is contrast to previously reported 1D EFSCs designed for perpendicular electric field component measurement. Thus, a 3D EFS with low cross-axis coupling interference can be realized using three proposed 1D EFSCs. This 3D EFS has the advantages of low cross-axis coupling interference, small size, and high integration. The testing and calibration systems of the proposed 3D EFS were developed. Experimental results show that in the range of 0-120 kV/m, cross-axis sensitivities are within 5.48%, and the total measurement errors of this 3D EFS are within 6.16%.

A High Sensitivity Electric Field Microsensor Based on Torsional Resonance.

This paper proposes a high sensitivity electric field microsensor (EFM) based on torsional resonance. The proposed microsensor adopts torsional shutter, which is composed of shielding electrodes and torsional beams. The movable shielding electrodes and the fixed sensing electrodes are fabricated on the same plane and interdigitally arranged. Push-pull electrostatic actuation method is employed to excite the torsional shutter. Simulation results proved that the torsional shutter has higher efficiency of charge induction. The optimization of structure parameters was conducted to improve its efficiency of charge induction further. A micromachining fabrication process was developed to fabricate the EFM. Experiments were conducted to characterize the EFM. A good linearity of 0.15% was achieved within an electrostatic field range of 0-50 kV/m, and the uncertainty was below 0.38% in the three roundtrip measurements. A high sensitivity of 4.82 mV/(kV/m) was achieved with the trans-resistance of 100 MΩ, which is improved by at least one order of magnitude compared with previously reported EFMs. The efficiency of charge induction for this microsensor reached 48.19 pA/(kV/m).

A Mediated BOD Biosensor Based on Immobilized B. Subtilis on Three-Dimensional Porous Graphene-Polypyrrole Composite.

We have developed a novel mediated biochemical oxygen demand (BOD) biosensor based on immobilized Bacillus subtilis (B. subtilis) on three-dimensional (3D) porous graphene-polypyrrole (rGO-PPy) composite. The 3D porous rGO-PPy composite was prepared using hydrothermal method following with electropolymerization. Then the 3D porous rGO-PPy composite was used as a support for immobilizing negatively charged B. subtilis denoted as rGO-PPy-B through coordination and electrostatic interaction. Further, the prepared rGO-PPy-B was used as a microbial biofilm for establishing a mediated BOD biosensor with ferricyanide as an electronic acceptor. The indirect determination of BOD was performed by electrochemical measuring ferrocyanide generated from a reduced ferricyanide mediator using interdigited ultramicroelectrode array (IUDA) as the working electrode. The experimental results suggested a good linear relationship between the amperometric responses and BOD standard concentrations from 4 to 60 mg/L, with a limit detection of 1.8 mg/L (S/N ≥ 3). The electrochemical measurement of real water samples showed a good agreement with the conventional BOD5 method, and the good anti-interference as well as the long-term stability were well demonstrated, indicating that the proposed mediated BOD biosensor in this study holds a potential practical application of real water monitoring.